Compositional and Optical Properties of Sb Doped ZnO Thin Films

Abstract

Sb doped ZnO thin films were deposited onto cleaned glass substrates at different substrate temperature by using thermal evaporation method in vacuum. The atomic compositions of the grown films have been determined by Energy Dispersive Analysis of X-ray (EDAX) method by using an attachment to the Scanning Electron Microscope. The optical properties were measured in the photon wavelength ranging in between 300 and 2500 nm by using a UV-VIS-NIR spectrophotometer. An EDAX spectrum reveals that Sb is doped into the ZnO thin films. The film shows higher transmittance in infrared regions and reflectance in UV regions. The films have high absorptio n co-efficient (~105cm−1) above the fundamental absorption region that direct allowed transitions band gap. The band gap energy of the films found from 2.409 to 2.929 eV for substrate temperature variation.